HP 10706 Plane Mirror Interferometer Family

The HP 10706 interferometers are used for multiple axis X-Y stage applications. The HP 10706B is functionally equivalent to the HP 10706A Plane Mirror Interferometer, but is a thermally stable optic that improves measurement during temperature changes. The HP 10706B reduces measurement drift to 1/12 the value typically achieved by conventional plane mirror interferometers. Both units can be used to bend the beam, but cannot be used as the moving component.

The HP 10706 measurement optics tailor systems for the physical layout and measurement requirements of individual applications. Configured with appropriate laser head and system electronics, the optics build a positioning system that improves product quality, increases yields, and facilitates manufacture of precision products.

This product family includes

HP 10706A Plane Mirror Interferometer

HP 10706B High Stability Plane Mirror Interferometer

[ Features ]

Designed for beam diameters of 6 mm or less
Tolerates angular misalignment (up to minutes of arc) of the plane mirror reflector
Thermal stability standard or retrofittable
Available for use in PC and VMEbus compatible HP systems

[ Specifications ]

Typical Measurement Mirror Alignment Requirements (as a function of distance):

	152 mm (6 in):  +/- 6 arc-min from normal

	305 mm (12 in): +/- 3 arc-min from normal

	508 mm (20 in): +/- 1.5 arc-min from normal

Measurement Optics Summary:

	Application: Plane Mirror

	Optics Resolution:
		lambda/4 (18.25 nm)

	System Resolution: 
		lambda/128 (5 nm)

		When used with the HP 10897B High Resolution Laser Axis Board
		for VMEbus.

   		lambda/1024 (0.6 nm) 


		When used with the HP 5527B Laser Positioning Transducer System, 
		HP 10885A PC Axis Board or HP 10895A Laser Axis Board for VMEbus.

	Beam Separation: 12.7 mm (1/2 in)

	Reflector: HP 10724A

		Reflector Weight: 50 g (1.8 oz)

	Mount Used: HP 10711A

[ Ordering ]

HP 10706A Plane Mirror Interferometer Opt 080 Fiber-Optic Receiver Adapter HP 10706B High-Stability Plane Mirror Interferometer Opt 080 Fiber-Optic Receiver Adapter The HP 10723A High Stability Adapter converts the HP 10706A to an HP 10706B.

[ Assistance ]

To help you make the right instrument choices

Local Sales Office

Related product groups available online:

Single Axis Interferometers