HP 10706A Plane Mirror Interferometer

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The HP 10706A Plane Mirror Interferometer is a dual-pass interferometer used for multiple-axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. It can be used to bend the beam, but it cannot be used as the moving component. The HP 10706A can accept a range of measurement mirror angular alignment changes.

The HP 10706A is one member of a family of measurement optics that tailor interferometer systems for the physical layout and measurement requirements of each application. Configured with appropriate laser head and system electronics, the optics are part of a precise positioning system providing the highest positioning accuracy, resolution, and repeatability.


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Typical Measurement Mirror Alignment Requirements (as a function of distance):

	152 mm (6 in):  +/- 6 arc-min from normal
	305 mm (12 in): +/- 3 arc-min from normal
	508 mm (20 in): +/- 1.5 arc-min from normal

Measurement Optics Summary

	Application: Plane mirror measurement reflector

	Resolution:

		Optics: lambda/4 (158.25 nm)

		System:	lambda/128 (5 nm)

			(When used with the HP 5527B Laser Positioning Transducer 
			System, HP 10885A PC Axis Board or HP 10895A Laser Axis 
			Board for VMEbus.)

			lambda/1024 (0.6 nm)

			(When used with the HP 18097B High Resolution Laser Axis
			Board for VMEbus.)


	Beam Separation: 12.7 mm (1/2 in)

	Recommended Reflector: HP 10724A

		Reflector Weight: 50 g (1.8 oz)

	Mount Used: HP 10711A

	Weight: 308 g (10.8 oz)


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HP 10706A	Plane Mirror Interferometer<
   Opt 080	Fiber-Optic Receiver Adapter

The HP 10711A Adjustable Mount is available for use with the HP 10706A. The HP 10706A is supported in combination with the HP 10724A Plane Mirror Reflector. The HP 10706A can be used in a variety of laser-interferometer positioning systems including the HP PC compatible and VMEbus compatible systems.

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[ Summary ][ Features ][ Specifications ][ Key Literature ][ Ordering ][ Assistance ][ Related ]

To help you make the right instrument choices

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Related HP 10706 Plane Mirror Interferometer Family product datasheets:

Related product families available online:



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Page Updated: Thursday November 13 08:29:19 UTC 1997