HP 10716A High-Resolution Interferometer

The HP 10716A High-Resolution Interferometer is used for single and multiple axis applications such as precision X-Y stages. The HP 10716A offers high system measurement accuracy, repeatability, and thermal stability. The HP 10716A Option 001 is available for optical layouts that require the interferometer to turn the beam.

The HP 10716A is one member of a family of interferometer systems that can be tailored to the physical layout and measurement requirements of each application. Configured with appropriate laser head and system electronics, the optics contribute to a precise positioning system providing the highest positioning accuracy, resolution, and repeatability.

[ Features ]

Designed for beam diameters of 6 mm or less
Twice the measurement resolution with same thermal stability as the HP 10706B
Available for use in PC and VMEbus compatible HP systems

[ Specifications ]

Measurement Optics Summary

	Application: High Resolution Plane Mirror

	Resolution:

		Optics:	lambda/8 (79 nm)

		System:	lamda/256 (2.5 nm)

			(When used with the HP 5527B Laser Positioning Transducer System, 
			HP 10885A PC Axis Board or HP 10895A Laser Axis Board for VMEbus.)

			lambda/2048 (0.3 nm)

			(When used with the HP 18097B High Resolution Laser Axis
			Board for VMEbus.)

	Beam Separation: 12.7 mm (1/2 in)

	Recommended Reflector: HP 10724A

		Reflector Weight: 50 g (1.8 oz)

	Mount Used: 10711A

	Weight: 502 g (1.11 lb)

	Thermal Drift Coefficient: 0.04 micrometer/degree C 
		(1.6 microinch/degree C) Typical

		(Change of indicated distance/degree C temperature change)

Typical Measurement Mirror Alignment Requirements:

	Depends on distance between interferometer and plane mirror.
	Typical mirror pitch/yaw angles are:

		152 mm (6 in):  +/- 6 arc-min
		305 mm (12 in): +/- 3 arc-min
		508 mm (20 in): +/- 2 arc-min

[ Ordering ]

HP 10716A High-Resolution Interferometer Opt 001 Turned Configuration (required in optical layouts where the interferometer must turn the beam)

The HP 10711A Adjustable Mount is available for use with the HP 10716A.

The HP 10716A is supported in combination with the HP 10724A Plane
Mirror Reflector.

The HP 10716A can be used in a variety of laser-interferometer
positioning systems including the HP PC compatible and VMEbus compatible
systems.

[ Assistance ]

To help you make the right instrument choices

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[ Related ]

Related product families available online:

Single Axis Interferometers