HP 10719A One-axis Differential Interferometer

Used in single- and multiple-axis applications, the HP 10719A makes either a differential linear or angular measurement. The linear measurement gauges the displacement between two objects, such as a stage and an optical column or inspection tool. The HP 10719A also measures either pitch or roll. An angle is measured when both reference and measurement beams measure to the same mirror.

The HP 10719A improves control and overall system accuracy. Configured with appropriate laser head and system electronics, the HP 10719A interferometer can be incorporated into HP's precise positioning systems to improve product quality, increase yields, and facilitate manufacture of precision products.

[ Features ]

High immunity to unwanted interferometer displacement, such as thermal expansion
Column-referenced measurements enhance semiconductor inspection
X-ray systems benefit from column referencing
Modular, compact design
Abbé offset error decreased with pitch measurement
Monolithic optics for 3 mm beam
Kinematic installation

High Immunity

The HP 10719A measures the linear distance between two objects, instead of the distance between the interferometer and an object. Errors common to the reference and measurement path are removed because both are equally affected. This method can improve overlay accuracy in some lithography systems.

Column-Referenced Measurements

Mask and IC inspection typically require the stage to be moved linearly by small increments with respect to an inspection instrument (such as a microscope). The HP 10719A referencing facilitates comparison of the newly created image with a desired image.

X-Ray Systems

Because X-rays provide finer line-width lithography -- the wavelengths are shorter than optical wavelengths -- slight yaw misalignment can greatly reduce the system's capability. The HP 10719A achieves the required accuracy by referencing the multiaxis stage movement to the mask holder.

Modular, Compact Design

The design simplifies the integration of the HP 10719A into customized measurement systems with one to six axes.

[ Specifications ]

Weight: 300 g (11 oz)

Axes: Linear or pitch or roll

Available Beam Size: 3mm

Thermal Drift Coefficient (Average): 150 nm (5.9 uin)/degree C

Angular Range (at 300mm):

	Pitch/roll: +/-0.44 mrad (+/-1.5 arc-min)

	(Angular range is the maximum measurement mirror angle due to all components 
	i.e., yaw and pitch, or yaw and roll) between the measurement mirror and the 
	interferometer for a 6-axis system. Angular range is dependent on the 
	measurement distance. Angular range is reduced when the reference mirror 
	is misaligned.)

Parallelism (Input to output beams):

	<0.1 mrad (20 arc-sec)

Measurement Optics Summary:

	Application: One-axis Differential Measurements (Plane Mirror)

	Optics Resolution Linear: lambda/4 (158.25 nm)

	System Resolution:

		Linear: lambda/128 (5 nm)

		Pitch: 0.26 urad (0.054 arc-sec)

		(When used with the HP 5527B Laser Positioning Transducer System, 
		HP 10885A PC Axis Board or HP 10895A Laser Axis Board for VMEbus.)



		Linear: lambda/1024 (0.6 nm)

		Pitch: 0.032 urad (0.007 arc-sec)

		(When used with the HP 10897B High Resolution Laser Axis Board
		for VMEbus.)

	Reflector/Reflector Weight: Custom

	Mount Used: Custom

[ Ordering ]

HP 10719A One-axis Differential Interferometer

The HP 10719A is supported in combination with the HP 10780F fiber optic 
remote receivers.

The HP 10719A can be used in a variety of laser-interferometer positioning 
systems including the HP PC compatible and VMEbus compatible systems.

[ Assistance ]

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[ Related ]

Related product families available online:

Differential and Compensation Interferometers