HP 10735A Three-axis Interferometer

The HP 10735A is used in multiple-axis applications where linear and angular control of the stage is required. It combines in a single package the functionality of an optical bench with multiple beam benders, beam splitters, and three interferometers. The interferometers split an incoming laser beam into three beams to measure linear distance, pitch and yaw, or linear distance, roll and yaw. Three linear measurements provide the basis for calculating two angular measurements.

Configured with appropriate laser head and system electronics, the HP 10735A optical bench can be incorporated into precise positioning systems to improve product quality, increase yields, and facilitate the manufacture of precision products.

[ Features ]

High performance package saves setup time and improves system performance
Simple multiaxis installation
High angular resolution for better control
Wide angle range
Monolithic optics for maximized mechanical stability
Prealigned fiber-optic remote receiver mounting
Referenced optics

High Performance Package

Combined functionality eliminates expensive, time-consuming interaxis setup and alignment. Custom HP factory fixtures and measuring equipment align and lock the parallel beams to guaranteed specifications. The resulting system achieves greater stability and accuracy than is practical with discrete components.

Simple Installation

All axes are referenced to the interferometer's mounting surface for easy kinematic installation onto a user-supplied reference surface. Simply slide the interferometer into place and bolt it down.

High Angular Resolution

Better control over the multiaxis stage enables superior grid accuracy in lithography applications.

Wide Angle

The wide angular measurement range, with a 9 mm laser beam, allows both global and site-by-site stage correction under interferometric control -- achieving high positioning accuracy without degrading throughput.

Monolithic Optics

Monolithic optics provide tight interaxis coupling and minimize errors due to vibration.

[ Specifications ]

General:

	Weight: 5.5 kg (12 lbs)

	Axes: 3 linear axes which provide linear (X), pitch, and yaw; or, linear (Y), 
		roll and yaw.

	Available Beam Diam.: 3/6/9 mm

	Thermal Drift Coefficient (Average):

		Axes 1 and 2:	40 nm (1.6 uin)/degree C

		Axis 3:		100 nm (3.9 uin)/degree C

	Resolution: (Dependent on the electronics used. These specifications are 
		for the HP 5527A/B, HP 10885A, or HP 10895A electronics.)

		Linear: 5 nm

		Yaw: 0.2 urad (0.04 arc-sec)

		Pitch/roll: 0.24 urad (0.005 arc-sec)

	Angular Range (at 300 mm displacement): (Angular range is the maximum 
		angle between the measurement mirror and the interferometer 
		for a 6-axis system. Angular range is dependent on the measurement 
		distance. Both angles (pitch and yaw, or roll and yaw) can be at the 
		angular limit concurrently.)

		Pitch/roll: +/-1 mrad (+/-3.4 arc-min)

		Yaw:

			For 6mm beams: +/-1 mrad (+/-3.4 arc-min)

			For 9mm beams: +/-1.5 mrad (+/-5.1 arc-min)

	Parallelism (Measurement beams):

		Axes 1 and 2:	<40 urad (8 arc-sec)

		Axes 1 and 3:	<50 urad (11 arc-sec)

Measurement Optics Summary:

	Application: Three-axis Measurements (distance, pitch, yaw) (Plane Mirror)

	Optics Resolution:

		Linear: lambda/4 (158.25 nm)

	System Resolution: (When used with the HP 5527B Laser Positioning 
		Transducer System, HP 10885A PC Axis Board or HP 10895A Laser 
		Axis Board for VMEbus.)

		Linear:	lambda/128 (5 nm)

		Pitch:	0.24 urad (0.05 arc-sec)

		Yaw:	0.2 urad (0.04 arc-sec)

	Reflector/Reflector Weight: Custom

	Mount Used: Custom

[ Ordering ]

HP 10735A Three-axis Interferometer

The HP 10735A is supported in combination with the HP 10780F fiber-optic remote receivers.

The HP 10735A can be used in a variety of laser-interferometer positioning systems, including the HP PC compatible and VMEbus compatible systems.

The HP 10736A Three-axis Interferometer offers similar functionality as the HP 10735A, but provides different beam patterns. The HP 10736A Option 001 includes a beam bender for fixed compensation axis.

[ Assistance ]

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[ Related ]

Related product families available online:

Multiple Axis Interferometers