HP 10737 Compact Three-axis Interferometer Family

The HP 10737L and HP 10737R three-axis interferometers improve positioning accuracy of precision equipment. Multiaxis laser measurements provide precise control of multiaxis stages. Each linear and angular degree of freedom can be measured and controlled to compensate for mechanical imperfections in the stage's motion.

Three linear measurements provide the basis for calculating two angular measurements. By using two of these interferometers together, your system can make redundant yaw measurements for mirror mapping.

The HP 10737L/R left- or right-turning units can be configured with appropriate laser head and system electronics to build precise positioning systems that improve product quality, increase yields, and facilitate manufacture of precision products.

This product family includes

HP 10737L Compact Three-axis Interferometer

HP 10737R Compact Three-axis Interferometer

[ Features ]

Simple multiaxis installation and alignment
Quick connection to remote receiver pickups
Compact, inexpensive package
3-mm beam diameter (from the HP 5517C Option 003 Laser Head)
Simple Installation
All three axes are aligned simultaneously. The HP 10737 also includes built-in remote pickup for the HP 10780F Option 001 Remote Receivers.
Quick Connection
A simple snap connection for the fiber optic cable quickly connects the receiver to remote pickups.

[ Specifications ]

Linear, Yaw, Pitch, and Roll
Linear Resolution:	
	5nm, using HP 5527A/B, HP 10885A, HP 10895A electronics
	0.6nm, using HP 10987B electronics

Yaw Resolution:	
	0.35 urad (0.07 arc-sec), using HP 5527A/B, HP10885A, HP 10895A electronics
	0.04 urad (0.01 arc-sec), using HP 10897B electronics

Pitch & Roll Resolution:	
	0.7 urad (0.14 arc-sec), using HP 5527A/B, HP 10885A, HP 10895A electronics
	0.1 urad (0.02 arc-sec), using HP 10897B electronics

Yaw Range: +/- 44 mrad (+/- 1.5 arc-min)

Pitch & Roll Range: +/- 0.44 mrad (+/- 1.5 arc-min)

Linear Range: 10 m (33 ft) total for all three axes

Thermal Drift Coefficient: 0.1 um/degree C (40uin/degree C) 
	typical average for each axis

Weight:	490 gm (18 oz)

Installation:
	Uses 3-mm beam available from HP 5517C Option 003
				
	Requires three HP 10780F Option Remote Receivers

	Compatible with HP 10711A Mount

Measurement (Plane) Mirror Recommendations:
	Reflectance: 98% at 633 nm at normal incidence

	Flatness: Flatness deviations will appear as measurement errors
		when the mirror is scanned perpendicular to the beam. Recommended 
		range: lambda/4 (0.16 um or 6 uin) to lambda/20 (0.03um or 1.2 uin) 
		dependant on accuracy requirements

	Optical Surface Quality:	60-40 per MIL 0-13830

[ Ordering ]

HP 10737L Compact Three-axis Left-Turning Interferometer HP 10737R Compact Three-axis Right-Turning Interferometer The HP 10737 interferometers can be used in a variety of laser-interferometer positioning systems, including the HP PC compatible and VMEbus compatible systems.

[ Assistance ]

To help you make the right instrument choices

Local Sales Office

Related product groups available online:

Multiple Axis Interferometers