HP 10737 Compact Three-axis Interferometer Family

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The HP 10737L and HP 10737R three-axis interferometers improve positioning accuracy of precision equipment. Multiaxis laser measurements provide precise control of multiaxis stages. Each linear and angular degree of freedom can be measured and controlled to compensate for mechanical imperfections in the stage's motion.

Three linear measurements provide the basis for calculating two angular measurements. By using two of these interferometers together, your system can make redundant yaw measurements for mirror mapping.

The HP 10737L/R left- or right-turning units can be configured with appropriate laser head and system electronics to build precise positioning systems that improve product quality, increase yields, and facilitate manufacture of precision products.


This product family includes


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Linear, Yaw, Pitch, and Roll

Linear Resolution: 5nm, using HP 5527A/B, HP 10885A, HP 10895A electronics 0.6nm, using HP 10987B electronics Yaw Resolution: 0.35 urad (0.07 arc-sec), using HP 5527A/B, HP10885A, HP 10895A electronics 0.04 urad (0.01 arc-sec), using HP 10897B electronics Pitch & Roll Resolution: 0.7 urad (0.14 arc-sec), using HP 5527A/B, HP 10885A, HP 10895A electronics 0.1 urad (0.02 arc-sec), using HP 10897B electronics Yaw Range: +/- 44 mrad (+/- 1.5 arc-min) Pitch & Roll Range: +/- 0.44 mrad (+/- 1.5 arc-min) Linear Range: 10 m (33 ft) total for all three axes Thermal Drift Coefficient: 0.1 um/degree C (40uin/degree C) typical average for each axis Weight: 490 gm (18 oz) Installation: Uses 3-mm beam available from HP 5517C Option 003 Requires three HP 10780F Option Remote Receivers Compatible with HP 10711A Mount Measurement (Plane) Mirror Recommendations: Reflectance: 98% at 633 nm at normal incidence Flatness: Flatness deviations will appear as measurement errors when the mirror is scanned perpendicular to the beam. Recommended range: lambda/4 (0.16 um or 6 uin) to lambda/20 (0.03um or 1.2 uin) dependant on accuracy requirements Optical Surface Quality: 60-40 per MIL 0-13830

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HP 10737L	Compact Three-axis Left-Turning Interferometer

HP 10737R	Compact Three-axis Right-Turning Interferometer

The HP 10737 interferometers can be used in a variety of laser-interferometer 
positioning systems, including the HP PC compatible and VMEbus compatible 
systems.


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