HP 10737L Compact Three-axis Interferometer

The HP 10737L left-turning three-axis interferometer improves positioning accuracy of precision equipment. Its multiaxis laser measurements provide precise control of multiaxis stages. Each linear and angular degree of freedom can be measured and controlled to compensate for mechanical imperfections in the stage's motion. Similar in function to the HP 10735A and HP 10736A interferometers, it provides a compact, lower-cost package.

Three linear measurements provide the basis for calculating two angular measurements. By using two of these interferometers together, your system can make redundant yaw measurements for mirror mapping. Mirror mapping further improves accuracy by compensating for mirror flatness deviations.

Configured with appropriate laser head and system electronics, the HP 10737L interferometer can be incorporated into precise positioning systems to improve product quality, increase yields, and facilitate manufacture of precision products.

[ Features ]

Simple multiaxis installation and alignment
Quick connection to remote receiver pickups
Compact, inexpensive package
3-mm beam diameter (from the HP 5517C Option 003 Laser Head)
Turns measurement beam to the left

Simple Installation

All three axes are aligned simultaneously. The HP 10737L also includes built-in remote pickup for the HP 10780F Option 001 Remote Receivers.

Quick Connection

A simple snap connection for the fiber optic cable quickly connects the receiver to remote pickups.

[ Specifications ]

Linear, Yaw, and Pitch
Linear Resolution:
	5nm, using HP 5527A/B, HP 10885A, HP 10897A electronics
	0.6nm, using HP 10897A electronics

Yaw Resolution:
	0.35 urad (0.07 arc-sec), using HP 5527A/B, HP 10885A, HP 10895A electronics
	0.04 urad (0.01 arc-sec), using HP 10897B electronics

Pitch & Roll Resolution:	
	0.7 urad (0.14 arc-sec), using HP 5527A/B, HP 10885A, HP 10895A electronics
	0.1 urad (0.02 arc-sec), using HP 10897B electronics								electronics

Yaw Range: +/-0.44 mrad (+/-1.5 arc-min)

Pitch & Roll Range: +/-0.44 mrad (+/- 1.5 arc-min)

Linear Range: 10 m (33 ft) total for all three axes



Environmental and Physical Specifications
Operating Temperature:	
	0-40 degrees C (17-23 degrees C) to ensure system non-linearity specification)

Thermal Drift Coefficient:
	0.1 um/degree C (40 uin/degree C) typical average for each axis

Weight: 490 gm (18 oz)

Materials Used:
	Housing: stainless steel and aluminum
	Optics: optical grade glass
	Adhesives: vacuum grade
	Receiver inserts: urethane foam, acetal, 15% glass fill polyester



Measurement (Plane) Mirror Recommendations
Reflectance: 98% at 633 nm at normal incidence

Flatness:
	Flatness deviations will appear as measurement errors when the mirror 
	is scanned perpendicular to the beam

	Recommended range lambda/4 (0.16um or 6uin) to lambda/20 (0.03um
	or 1.2uin) dependent on accuracy requirements

Optical Surface Quality: 60-40 per Mil 0-13830

[ Ordering ]

HP 10737L Compact Three-axis Left-Turning Interferometer

The HP 10737L is supported in combination with the HP 10780F Option 001 Remote Receivers, and the HP 5517C Option 003 Laser Head.

The HP 10737R Compact Three-axis Interferometer offers identical functionality to the HP 10737L, but the HP 10737R turns the beam to the right.

The HP 10737L can be used in a variety of laser-interferometer positioning systems, including the HP PC-compatible and VMEbus compatible systems.

[ Assistance ]

To help you make the right instrument choices

Local Sales Office

[ Related ]

Related HP 10737 Compact Three-axis Interferometer Family product datasheets:

HP 10737L Compact Three-axis Interferometer

HP 10737R Compact Three-axis Interferometer

Related product families available online:

Multiple Axis Interferometers