HP 10896B Laser Compensation Board for VMEbus

The HP 10896B compensation board increases the accuracy and repeatability of HP's VME-based laser interferometer positioning systems. Using your own or HP's environmental sensors, the HP 10896B detects and compensates for changes in the system's operating environment. The HP 10751C/D Air Sensor can be used to provide an accuracy up to +/-1.5 ppm. HP 10757D/E/F Material Temperature Sensors are used to compensate for thermal expansion errors.

For greatest accuracy and repeatability, an HP 10717A Wavelength Tracker can be used to provide measurement repeatability up to +/-0.14 ppm. This technique uses an additional laser axis and tracks changes in the air's index of refraction.

As part of an HP VMEbus positioning system, the HP 10896B can be used to improve performance in applications using IC manufacturing equipment (wafer steppers, E-beam systems, and flat-panel steppers), precision machine tools, and custom stages. The exceptional accuracy of the laser system allows the precise positioning and motion control required for the consistent manufacture of high-quality products.

[ Features ]

Automatically compensates for environmental changes that affect WOL
Automatically compensates for equipment thermal expansion
Increases accuracy and repeatability of systems using either HP 10897B high resolution or HP 10895A laser axis boards for VMEbus
Single-width front panel, 6U-size board uses surface-mount technology for compact, reliable electronics
Programmable for use with custom sensors
High reliability backed by three-year warranty

Environmental Compensation

Because each measurement depends on the wavelength-of-light (WOL) as its
basic scale length, changes in air temperature, pressure, humidity, and
gas composition change the air's index of refraction, which in turn
changes the WOL in air.  The HP 10896B uses the HP 10751C/D Air Sensor
to measure and compensate for the changes.

Thermal Expansion

Measurement errors can result from thermal expansion of the workpiece or
machine being measured.  Up to four HP 10757D/E/F Material Temperature
Sensors can be used to measure material temperature and to compensate
for thermal expansion errors.

[ Specifications ]

Compensation
Environment:
	Pressure:		760 mm +/-25 mm Hg
	Relative Humidity:	50% +/-10%
	Temperature:		as shown in table
--------------------------------------------------------------------------
				Measurement Accuracy*
			+/-0.1 deg. C	+/-1.0 deg. C	+/-5.0 deg. C
--------------------------------------------------------------------------
No compensation**	+/-9.0 ppm	+/-9.9 ppm	+/-1.7 ppm
(@20 degrees C)

HP 10751C/D Air Sensor	+/-1.5 ppm	+/-1.6 ppm	+/-1.7 ppm
(@20 degrees C)				(typical)

Wavelength Tracking	+/-0.15 ppm	+/-0.19 ppm	+/-0.44 ppm
Compensation***

Measurement in Vacuum	+/-0.1 ppm	+/-0.1 ppm	+/-0.1 ppm

Measurement in Vacuum	+/-0.02 ppm	+/-0.02 ppm	+/-0.02 ppm
with Factory 
calibration of Laser
Head to MIL STD 45662
-------------------------------------------------------------------------
*	These accuracy specifications include the laser head term, 
	but exclude electronics accuracy and interferometer nonlinearity 
	terms.
**	No compensation means that no correction in compensation number
	occurs during environmental changes.
***	System accuracy equals these values (measurement repeatability) 
	for a calibrated laser head accuracy of initial compensation 
	value.
-------------------------------------------------------------------------



Environmental Sensors 
HP 10717A Wavelength Tracker
HP 10751C/D Air Sensor
HP 10757D/E/F Material Temperature Sensor (up to four)



Resolution
Wavelength Tracker: 5nm

Analog Sensor Inputs: 76.3mv



Backplane I/O Characteristics
All blackplane I/O signals are TTL compatible. 
Refer to the manual for further details.

Sensor inputs: +/-2.5 volts



General Information
VME Compliance:
	Complies with VME Specification Rev. C.1 Single width 6U size
	A16 Data Transfer Cycles
	A24 Data Transfer Cycles
	D08(OE) Data Transfer Cycles
	D16 Data Transfer Cycles
	D08(O) Interrupt Acknowledge Cycles

Power Requirements
	+5 Vdc +0.25 V/-0.125 V at less than 2.8A
	+12 Vdc +0.6 V/-0.36 V at less than 0.4A
	-12 Vdc -0.6 V/+0.36 V at less than 0.4 A

Cooling Requirements
	19 linear meters (60 linear feet) per minute for 0-40 degrees C 
	operation 76 linear meters (250 linear feet) per minute minimum for 
	0-55 degrees C operation

Weight: 0.45 kg (1 lb)

[ Ordering ]

HP 10896B Laser Compensation Board for VMEbus Opt 002 2 Axis Interconnect Cable Opt 003 3 Axis Interconnect Cable Opt 004 4 Axis Interconnect Cable Opt 005 5 Axis Interconnect Cable Opt 006 6 Axis Interconnect Cable Opt 007 7 Axis Interconnect Cable Opt W50 5-Year Return Repair Service

HP 10717A		Wavelength Tracker
HP 10751C		Air Sensor
HP 10751C		Air Sensor
HP 10757D		Material Temperature Sensor
HP 10757E		Material Temperature Sensor
HP 10757F		Material Temperature Sensor
HP 10880A		Receiver Cable
HP 10880B		Receiver Cable
HP 10880C		Receiver Cable
HP 10881A		Laser Head Cable
HP 10881B		Laser Head Cable
HP 10881C		Laser Head Cable
HP 10881D		Laser Head Cable
HP 10881E		Laser Head Cable
HP 10881F		Laser Head Cable
HP 10895A		Laser Axis Board for VMEbus
HP 10897B		High Resolution Laser Axis Board for VMEbus

[ Assistance ]

To help you make the right instrument choices

Local Sales Office

[ Related ]

Related product families available online:

HP1089XX VME Electronics Family